Method for forming semiconductor structure by patterning resist layer having inorganic material

ABSTRACT

A method for forming a semiconductor device structure is provided. The method includes forming a material layer over a substrate, and forming a first layer over the material layer. The method also includes forming a second layer over the first layer, and the second layer includes an auxiliary. The method further includes forming a third layer over the second layer, and the third layer includes an inorganic material, the inorganic material includes a plurality of metallic cores, and a plurality of first linkers bonded to the metallic cores. A topmost surface of the second layer is in direct contact with a bottommost surface of the third layer. The method includes exposing a portion of the second layer by performing an exposure process, and the auxiliary reacts with the first linkers during the exposure process.

CROSS REFERENCE TO RELATED APPLICATIONS

This is a divisional application of U.S. patent application Ser. No.16/021,521 filed on Jun. 28, 2018, which is incorporated herein byreference in its entirety. This application is related to the followingco-pending a commonly assigned patent application: U.S. Ser. No.16/053,463, filed on Aug. 2, 2018, entitled “Method for formingsemiconductor structure ” (applicant Docket No. P20173034US01), theentirety of which is incorporated by reference herein. This Applicationclaims the benefit of U.S. Provisional Application No. 62/576,782 filedon Oct. 25, 2017, and entitled “Inorganic resist and method for formingsemiconductor device structure using inorganic resist”, the entirety ofwhich is incorporated by reference herein.

BACKGROUND

Semiconductor devices are used in a variety of electronic applications,such as personal computers, cell phones, digital cameras, and otherelectronic equipment. Semiconductor devices are typically fabricated bysequentially depositing insulating or dielectric layers, conductivelayers, and semiconductive layers of material over a semiconductorsubstrate, and patterning the various material layers using lithographyto form circuit components and elements thereon. Many integratedcircuits are typically manufactured on a single semiconductor wafer, andindividual dies on the wafer are singulated by sawing between theintegrated circuits along a scribe line. The individual dies aretypically packaged separately, in multi-chip modules, for example, or inother types of packaging.

However, these advances have increased the complexity of processing andmanufacturing ICs. Since feature sizes continue to decrease, fabricationprocesses continue to become more difficult to perform. Therefore, it isa challenge to form reliable semiconductor devices at smaller andsmaller sizes.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It shouldbe noted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1A-1D show cross-sectional representations of various stages offorming a semiconductor structure, in accordance with some embodimentsof the disclosure.

FIG. 2A shows a diagrammatical view of a chemical structure of theresist layer before performing the exposure process, in accordance withsome embodiments.

FIG. 2B shows a diagrammatical view of a chemical structure of theresist layer after performing the exposure process, in accordance withsome embodiments.

FIGS. 3A-3D show cross-sectional representations of various stages offorming a semiconductor structure, in accordance with some embodimentsof the disclosure.

FIGS. 4A-4E show cross-sectional representations of various stages offorming a semiconductor structure, in accordance with some embodimentsof the disclosure.

FIGS. 5A-5G show cross-sectional representations of various stages offorming a semiconductor structure, in accordance with some embodimentsof the disclosure.

FIGS. 6A-6H show cross-sectional representations of various stages offorming a semiconductor structure, in accordance with some embodimentsof the disclosure.

FIGS. 7A-7G show cross-sectional representations of various stages offorming a semiconductor structure, in accordance with some embodimentsof the disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the subject matterprovided. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Some variations of the embodiments are described. Throughout the variousviews and illustrative embodiments, like reference numbers are used todesignate like elements. It should be understood that additionaloperations can be provided before, during, and after the method, andsome of the operations described can be replaced or eliminated for otherembodiments of the method.

The advanced lithography process, method, and materials described in thecurrent disclosure can be used in many applications, including fin-typefield effect transistors (FinFETs). For example, the fins may bepatterned to produce a relatively close spacing between features, forwhich the above disclosure is well suited. In addition, spacers used informing fins of FinFETs can be processed according to the abovedisclosure.

Embodiments for a semiconductor structure and method for forming thesame are provided. FIGS. 1A-1D show cross-sectional representations ofvarious stages of forming a semiconductor structure, in accordance withsome embodiments of the disclosure. The method can be used in manyapplications, such as fin-type field effect transistor (FinFET) devicestructure.

Referring to FIG. 1A, a substrate 102 is provided. The substrate 102 maybe made of silicon or another semiconductor material. In someembodiments, the substrate 102 is a wafer. Alternatively oradditionally, the substrate 102 may include other elementarysemiconductor materials such as germanium (Ge). In some embodiments, thesubstrate 102 is made of a compound semiconductor or alloysemiconductor, such as silicon carbide, gallium arsenic, indiumarsenide, or indium phosphide, silicon germanium, silicon germaniumcarbide, gallium arsenic phosphide, or gallium indium phosphide. In someembodiments, the substrate 102 includes an epitaxial layer. For example,the substrate 102 has an epitaxial layer overlying a bulk semiconductor.

Some device elements may be formed over the substrate 102. The deviceelements include transistors (e.g., metal oxide semiconductor fieldeffect transistors (MOSFET), complementary metal oxide semiconductor(CMOS) transistors, bipolar junction transistors (BJT), high-voltagetransistors, high-frequency transistors, p-channel and/or n channelfield effect transistors (PFETs/NFETs), etc.), diodes, and/or otherapplicable elements. Various processes are performed to form deviceelements, such as deposition, etching, implantation, photolithography,annealing, and/or other applicable processes.

The substrate 102 may include various doped regions such as p-type wellsor n-type wells). Doped regions may be doped with p-type dopants, suchas boron or BF₂, and/or n-type dopants, such as phosphorus (P) orarsenic (As). In some other embodiments, the doped regions may be formeddirectly on the substrate 102.

The substrate 102 also includes isolation structures (not shown). Theisolation structure is used to define and electrically isolate variousdevices formed in and/or over the substrate 102. In some embodiments,the isolation structure includes shallow trench isolation (STI)structure, local oxidation of silicon (LOCOS) structure, or anotherapplicable isolation structure. In some embodiments, the isolationstructure includes silicon oxide, silicon nitride, silicon oxynitride,fluoride-doped silicate glass (FSG), or another suitable material.

Afterwards, a material layer 104 is formed over the substrate 102, and aresist layer 110 is formed over the material layer 104, in accordancewith some embodiments of the disclosure. In some embodiments, thematerial layer 104 or the resist layer 110 is independently formed by adeposition process, such as a spin-on coating process, chemical vapordeposition process (CVD), physical vapor deposition (PVD) process,and/or other suitable deposition processes.

Next, as shown in FIG. 1B, a mask 10 is formed over the resist layer110, and an exposure process 172 is performed on the resist layer 110 toform an exposed region and an unexposed region, in accordance with someembodiments of the disclosure.

The radiation energy of the exposure process 172 may include a 248 nmbeam by Krypton Fluoride (KrF) excimer lasers, a 193 nm beam by ArgonFluoride (ArF) excimer lasers, a 157 nm beam by Fluoride (F₂) ExcimerLasers, or Extreme ultra-violet (EUV) light, such as EUV light withwavelength of about 13.5 nm.

After the exposure process 172, a post-exposure-baking (PEB) process isperformed. In some embodiments, the PEB process includes using amicrowave or an IR lamping heating process. In some embodiments, the PEBprocess is performed at a temperature in a range from about 70 degreesCelsius to about 250 degrees Celsius. In some embodiments, the PEBprocess is performed for a period of time in a range from about 20seconds to about 240 seconds. It should be noted that since themicrowave or the IR lamping heating process can provide the heatuniformly, the resist layer 110 is baked at a certain temperatureuniformly by using the microwave or the IR lamping heating process. Thechemical reaction in the resist layer 110 can react quickly by providingheat uniformly. As a result, the heating time of the baking process maybe reduced to be shorter than 30 seconds.

FIG. 2A shows a diagrammatical view of a chemical structure of theresist layer 110 before performing the exposure process 172, inaccordance with some embodiments.

In some embodiments, the resist layer 110 includes an inorganic material12 and an auxiliary 14, and a solvent. The inorganic material 12 and theauxiliary 14 are distributed uniformly in the solvent. The inorganicmaterial 12 includes a number of metallic cores 122 and a number offirst linker L₁ 124 bonded to the metallic cores 122. In someembodiments, the first linker L₁ 124 is chemically bonded to themetallic cores 122. The chemical bonding of the chemical bonds may be asingle bonding or a conjugated bonding. The auxiliary 14 may include thephotoacid generator (PAG), the quencher (Q), the cross-linker, the photobase generator (PBG), or combinations thereof. In some embodiments, theweight ratio of the auxiliary 14 to the solvent is in a range from about0.1 wt % to about 10 wt %. If the weight ratio of the auxiliary 14 tothe solvent is smaller than 0.1 wt %, the reaction rate of cross-linkingreactions between the inorganic material 12 and the auxiliary 14 may notbe increased. If the weight ratio of the auxiliary 14 to the solvent isgreater than 10 wt %, other unwanted chemical reactions may occur. Forexample, if the amount of the auxiliary 14 is too much, the meltingpoint of the inorganic material 12 may be decreased. Once the meltingpoint of the inorganic material 12 is decreased, the heat resistance ofinorganic material 12 to the baking temperature will be deceased and theperformance of the resist layer 110 will be degraded.

In some embodiments, the metallic cores 122 are made of metal, such astin (Sn), indium (In), antimony (Sb) or another applicable material. Insome embodiments, the first linkers 124 include aliphatic or aromaticgroup, unbranched or branched, cyclic or noncyclic saturated with 1-9carbon (C₁-C₉) unit having hydrogen or oxygen or halogen (such as, alky,alkene, benzene). The first linkers 124 are used to provide theradiation sensitivity in some embodiments. In some embodiments, thefirst linkers 124 have an hydroxyl group (—OH), the second linkers L₂have an hydroxyl group (—OH), and the two hydroxyl groups react witheach other to perform a hydrolysis reaction. In some other embodiments,the first linkers L₁ 124 have a carbon-carbon double bond (alkenes), orthe carbon-carbon triple bonds (alkynes), and the second linkers L₂react with the first linkers L₁ 124 to perform an addition reaction. Insome other embodiments, the first linkers L₁ 124 have carbonyl (C═O)groups or imine (C═N) groups, and the second linkers L₂ react with thefirst linkers L₁ 124 to perform an addition reaction.

In some embodiments, the auxiliary 14 include the second linkers L₂ andthe third linkers L₃ which can react with the first linkers 124 on themetallic cores 122. With the help of the auxiliary 14, one of themetallic cores 122 bonds to another metallic core 122 to form a compound16 which has a size greater than the size of each of the metallic cores122.

In certain embodiments, the solvent includes propylene glycol methylether acetate (PGMEA), propylene glycol monomethyl ether (PGME),1-ethoxy-2-propanol (PGEE), gamma-butyrolactone (GBL), cyclohexanone(CHN), ethyl lactate (EL), methanol, ethanol, propanol, n-butanol,acetone, dimethylformamide (DMF), isopropyl alcohol (IPA),tetrahydrofuran (THF), methyl isobutyl carbinol (MIBC), n-butyl acetate(nBA), 2-heptanone (MAK), or a combination thereof.

In some embodiments, the photoacid generator (PAG) includes a cation andan anion. In some embodiments, the cation includes formulas (I) or (II).In some embodiments, the anion includes formulas (III), (IV), (V), (VI),(VII), (VIII), (IX), (X), (XI) or (XII).

In some embodiments, the quencher (Q) includes formulas (XIII), (XIV),(XV), (XVI), (XVII), (XVIII), (XIX), (XX) or (XXI).

In some embodiments, the cross-linker includes formulas (XXII), (XXIII),(XXIV), (XXV), (XXVI), (XXVII), (XXVIII), (XXIX), or (XXX).

In some embodiments, the photo base generator (PBG) includes formulas(XXXI), (XXXII), (XXXIII), (XXXIV), (XXXV), (XXXVI), (XXXVII),(XXXVIII), or (XXXIX), (XL), (XLI) or (XLII).

FIG. 2B shows a diagrammatical view of a chemical structure of theresist layer 110 after performing the exposure process 172, inaccordance with some embodiments. It should be noted that after theexposure process 172, the auxiliary 14 is used to help the cross-linkingreaction between the adjacent metallic cores 122. More specifically, thesecond linkers L₂ and the third linkers L₃ of the auxiliary 14 reactwith the first linkers 124 on the metallic cores 122 to form chemicalbonds between the inorganic material 12 and the auxiliary 14. Thechemical bonding of the chemical bonds may be a single bonding or aconjugated bonding. More specifically, the chemical bonds are formedbetween the second linkers L₂ of auxiliary 14 and the first linkers L₁124, and between the third linkers L₃ of auxiliary 14 and the firstlinkers L₁ 124.

During the exposure process 172, the adjacent first linker L₁ bonded ondifferent metallic cores 122 may react with each other by performing across-linking reaction. The inorganic material 12 having the metalliccores 122 and the first linker L₁ 24 is used to improve the radiationabsorption of the exposure process 172. For example, indium (In) or tin(Sn) based inorganic materials exhibit good absorption of farultraviolet light at a 193 nm wavelength and extreme ultraviolet lightat a 13.5 nm wavelength. Before performing the exposure process 172,there is a distance between the adjacent first linker L₁. In order toincrease the reaction rate of the cross-linking reaction, the auxiliary14 is added into the resist layer 110. The auxiliary 14 can shorten thedistance between adjacent metallic cores 122, and therefore one of firstlinkers L₁ 124 on the first the metallic core 122 can react with one ofthe first linkers L₁ 124 on the second metallic core 122 with the helpof the second linkers L₂ and the third linkers L₃ of the auxiliary 14.It should be noted that the cross-linking reaction between the adjacentmetallic cores 122 is improved by the addition of the auxiliary 14.

In a comparative embodiment, the resist layer 110 includes the inorganicmaterial 12 and the solvent, but does not include the auxiliary 14described above. The cross-linking reaction between the adjacentmetallic cores 122 in the comparative embodiment has a first reactionrate. In some embodiments, the resist layer 110 includes the inorganicmaterial 12 and the auxiliary 14 described above, and the solventdescribed above. The cross-linking reaction between the adjacentmetallic cores 122 has a second reaction rate. One of the metallic cores122 is bonded to another metallic core 122 by the addition of theauxiliary 14. The reaction rate of the cross-linking reaction betweenthe adjacent metallic cores 122 is increased by the help of theauxiliary 14. The second reaction rate is greater than the firstreaction rate due to the help of the auxiliary 14.

Next, as shown in FIG. 1C, the resist layer 110 is developed byperforming a develop process to form a patterned resist layer 110 a, inaccordance with some embodiments of the disclosure. The compound 16 isformed in the resist layer 110. The compound 16 is formed by reactingthe inorganic material 12 and the auxiliary 14. A portion of themetallic cores 122 is reacted with the auxiliary 14, but another portionof the metallic cores 122 is remaining in the resist layer 110.

There are two types of developing processes: a positive tone development(PTD) process and a negative tone development (NTD) process. The PTDprocess uses a positive tone developer, which generally refers to adeveloper that selectively dissolves and removes exposed portions of theresist layer. The NTD process uses a negative tone developer, whichgenerally refers to a developer that selectively dissolves and removesunexposed portions of the resist layer 110. In some embodiments, the PTDdevelopers are aqueous base developers, such as tetraalkylammoniumhydroxide (TMAH). In some embodiments, the NTD developers areorganic-based developers, such as n-butyl acetate (n-BA).

As shown in FIG. 1C, in some embodiments, the negative tone developer(NTD) process is performed, the exposed region of the resist layer 110remains, and the unexposed region of the resist layer 110 is removed bythe developer. The exposed region of the resist layer 110 becomes morehydrophilic after performing the exposure process 172, and thereforeorganic solvent is used to remove the unexposed region of the resistlayer 110. Furthermore, since the compound 16 has a greater averagemolecular weight than inorganic material, the compound 16 is not easilydissolved in the organic solvent. Therefore, the exposed region of theresist layer 110 remains while the unexposed region of the resist layer110 is removed.

The exposed region of the resist layer 110 has a number of protrudingstructures. In some embodiments, there is a first pitch P₁ which is adistance between the left sidewall surface of the first protrudingstructure and the left sidewall surface of the second protrudingstructure. In some embodiments, the first pitch P₁ is in a range fromabout 10 nm to about 40 nm.

Afterwards, as shown in FIG. 1D, a portion of the material layer 104 isremoved by performing an etching process and using the patterned resistlayer 110 a as a mask. As a result, the patterned material layer 104 ais obtained.

The etching process includes a number of etching operations. The etchingprocess may be a dry etching process or a wet etching process.Afterwards, the patterned resist layer 110 a is removed. In someembodiments, the patterned resist layer 110 a is removed by the wetetching process including a base solution, and the base solution istetraalkylammonium hydroxide (TMAH). In some other embodiments, thepatterned resist layer 110 a is removed by the wet etching processincluding HF solution.

The auxiliary 14 in the resist layer 110 is used to improve theabsorption energy of the resist layer 110 during the exposure process172. With the help of the auxiliary 14, the radiation energy of theexposure process 172 can be reduced to about 3 mJ to about 20 mJ.Furthermore, the line width roughness (LWR) of the resist layer 110 isimproved about 3% to about 40%. In addition, the critical dimensionuniformity (CDU) is also improved about 3% to about 40%. Therefore, thelithography resolution is improved.

FIGS. 3A-3D show cross-sectional representations of various stages offorming a semiconductor structure, in accordance with some embodimentsof the disclosure. The method can be used in many applications, such asfin-type field effect transistor (FinFET) device structure. Someprocesses and materials used to form the semiconductor device structurein FIGS. 3A-3D are similar to, or the same as, those used to form thesemiconductor device structure FIGS. 1A-1D and are not repeated herein.

As shown in FIG. 3A, a modified layer 109 is formed over the materiallayer 104, and the resist layer 110 is formed over the modified layer109. The modified layer 109 includes the auxiliary 14. The auxiliary 14may include the photoacid generator (PAG), the quencher (Q), thecross-linker or the photo base generator (PBG). The materials of theauxiliary 14 have been described above, and are omitted here forbrevity. The resist layer 110 includes the inorganic material 12 and thesolvent. The inorganic material 12 is distributed uniformly in thesolvent. The inorganic material 12 includes a number of metallic cores122 and a number of first linkers L₁ 124 bonded to the metallic cores122.

The resist layer 110 has a first thickness T₁, and the modified layer109 has a second thickness T₂. In some embodiments, the first thicknessT₁ is greater than the second thickness T₂. In some embodiments, a ratioof the first thickness T₁ to the second thickness T₂ is in a range fromabout 5% to about 20%.

Afterwards, as shown in FIG. 3B, the mask 10 is formed over the resistlayer 110, and the exposure process 172 is performed on the resist layer110 to form an exposed region and an unexposed region, in accordancewith some embodiments of the disclosure.

After the exposure process 172, the second linkers L₂ and the thirdlinkers L₃ of the auxiliary 14 react with the first linkers L₁ 124 onthe metallic cores 122 to form a number of chemical bonds between theinorganic material 12 and the auxiliary 14. With the help of theauxiliary 14, the chemical reaction between adjacent metallic cores 122is accelerated. The compound 16 with a greater size than one of themetallic cores 122 is formed in the resist layer 110. More specifically,the compound 16 has an average molecular weight that is greater thanthat of the metallic core 122 with the first linkers L₁ 124.

Next, as shown in FIG. 3C, the resist layer 110 and the modified layer109 are developed by performing a develop process to form a patternedresist layer 110 a and a patterned modified layer 109 a, in accordancewith some embodiments of the disclosure. In some embodiments, the resistlayer 110 and the modified layer 109 are simultaneously developed. Insome other embodiments, the resist layer 110 is patterned firstly, andthe modified layer 109 is patterned later. In some embodiments, thecompound 16 is closer to the interface between the modified layer 109and the resist layer 110 than the inorganic material 12.

In some embodiments, the negative tone developer (NTD) process isperformed, the exposed region of the resist layer 110 remains, and theunexposed region of the resist layer 110 is removed by the developer.The exposed region of the resist layer 110 will become more hydrophilicafter performing the exposure process 172, and therefore organic solventis used to remove the unexposed region of the resist layer 110.

Subsequently, as shown in FIG. 3D, a portion of the material layer 104is removed by performing an etching process and using the patternedresist layer 110 a and the patterned modified layer 109 a as a mask. Asa result, a patterned material layer 104 a is formed. Afterwards, thepatterned resist layer 110 a is removed.

FIGS. 4A-4E show cross-sectional representations of various stages offorming a semiconductor structure, in accordance with some embodimentsof the disclosure. The method can be used in many applications, such asfin-type field effect transistor (FinFET) device structure. Someprocesses and materials used to form the semiconductor device structurein FIGS. 4A-4E are similar to, or the same as, those used to form thesemiconductor device structure FIGS. 1A-1D and are not repeated herein.

As shown in FIG. 4A, a modified layer 109 is formed over the resistlayer 110. The modified layer 109 includes the auxiliary 14. Theauxiliary 14 may include the photoacid generator (PAG), the quencher(Q), the cross-linker or the photo base generator (PBG). The materialsof the auxiliary 14 have been described above, and are omitted here forbrevity. The resist layer 110 includes the inorganic material 12 and thesolvent. The inorganic material 12 is distributed uniformly in thesolvent. The inorganic material 12 includes the metallic cores 122 andthe first linkers L₁ 124 bonded to the metallic cores 122.

Afterwards, as shown in FIG. 4B, the mask 10 is formed over the modifiedlayer 109, and the exposure process 172 is performed on the modifiedlayer 109 and the resist layer 110, in accordance with some embodimentsof the disclosure.

After the exposure process 172, the second linkers L₂ and the thirdlinkers L₃ of the auxiliary 14 in the modified layer 109 react with thefirst linkers 124 on the metallic cores 122 in the resist layer 110 toform the chemical bonds between the inorganic material 12 and theauxiliary 14.

Afterwards, as shown in FIG. 4C, the modified layer 109 is developed byperforming a develop process to form a patterned modified layer 109 a,in accordance with some embodiments of the disclosure. In addition, aportion of the resist layer 110 is also removed. In some embodiments,the negative tone developer (NTD) process is performed, the exposedregion of the modified layer 109 remains, and the unexposed region ofthe modified layer 109 is removed by the developer.

Subsequently, as shown in FIG. 4D, the resist layer 110 is developed byperforming a develop process to form a patterned resist layer 110 a, inaccordance with some embodiments of the disclosure. The compound 16 iscloser to the interface between the modified layer 109 and the resistlayer 110 than the metallic cores 122.

Next, as shown in FIG. 4E, a portion of the material layer 104 isremoved by performing an etching process and using the patterned resistlayer 110 a and the patterned modified layer 109 a as a mask. As aresult, a patterned material layer 104 a is formed. Afterwards, thepatterned resist layer 110 a and the patterned modified layer 109 areremoved.

FIGS. 5A-5G show cross-sectional representations of various stages offorming a semiconductor structure, in accordance with some embodimentsof the disclosure. The method can be used in many applications, such asfin-type field effect transistor (FinFET) device structure. Someprocesses and materials used to form the semiconductor device structurein FIGS. 5A-5G are similar to, or the same as, those used to form thesemiconductor device structure FIGS. 1A-1D and are not repeated herein.

As shown in FIG. 5A, a tri-layer photoresist layer 120 is formed overthe material layer 104 over the substrate 102. The tri-layer photoresistlayer 120 includes a bottom layer 106, a middle layer 108 and a resistlayer 110. The tri-layer photoresist layer 120 is used to pattern theunderlying material layer 104 and then is removed.

The bottom layer 106 is formed over the material layer 104. The bottomlayer 106 may be a first layer of a tri-layer resist layer 120 (alsoreferred to as tri-layer photoresist). The bottom layer 106 may containa material that is patternable and/or have an anti-reflection property.In some embodiments, the bottom layer 106 is a bottom anti-reflectivecoating (BARC) layer. In some embodiments, the bottom layer 106 includesa carbon backbone polymer. In some embodiments, the bottom layer 106 ismade of silicon free material. In some other embodiments, the bottomlayer 106 includes novolac resin, such as a chemical structure havingmultiple phenol units bonded together. In some embodiments, the bottomlayer 106 is formed by a spin-on coating process, chemical vapordeposition process (CVD), physical vapor deposition (PVD) process,and/or other suitable deposition processes.

Afterwards, the middle layer 108 is formed over the bottom layer 106,and the resist layer 110 is formed over the middle layer 108. In someembodiments, the bottom layer 106, the middle layer 108 and the resistlayer (or the top layer) 110 are called tri-layer photoresist layer 120.The middle layer 108 may have a composition that provides ananti-reflective property and/or hard mask property for thephotolithography process. In addition, the middle layer 108 is designedto provide etching selectivity from the bottom layer 106 and the resistlayer 110. In some embodiments, the middle layer 108 is made of siliconnitride, silicon oxynitride or silicon oxide. In some embodiments, themiddle layer 108 includes a silicon-containing inorganic polymer. Insome embodiments, the resist layer 110 includes a chemical structure asshown in FIG. 2A.

Next, as shown in FIG. 5B, an exposure process (not shown) is performedon the resist layer 110 to form an exposed region and an unexposedregion, in accordance with some embodiments of the disclosure.Afterwards, the resist layer 110 is developed by a developer to form thepatterned resist layer 110 a. After the exposure process, the compound16 is formed in the resist layer 110.

Afterwards, as shown in FIG. 5C, a portion of the middle layer 108 isremoved by using the patterned resist layer 110 a as a mask to form apatterned middle layer 108 a, in accordance with some embodiments of thedisclosure. As a result, the pattern of the patterned resist layer 110 ais transferred to the middle layer 108.

The portion of the middle layer 108 is removed by a dry etching process,a wet etching process or a combination thereof. In some embodiments, theetching process includes a plasma etching process using an etchanthaving fluorine, such as CF₂, CF₃, CF₄, C₂F₂, C₂F₃, C₃F₄, C₄F₄, C₄F₆,C₅F₆, C₆F₆, C₆F₈, or a combination thereof.

Afterwards, as shown in FIG. 5D, the patterned resist layer 110 a isremoved, in accordance with some embodiments of the disclosure. In someembodiments, the patterned resist layer 110 a is removed by a wetetching process or a dry etching process. In some embodiments, thepatterned resist layer 110 a is removed by the wet etching processincluding a base solution, and the base solution is tetraalkylammoniumhydroxide (TMAH).

Next, as shown in FIG. 5E, a portion of the bottom layer 106 is removedby using the patterned middle layer 108 a as a mask to form a patternedbottom layer 106 a, in accordance with some embodiments of thedisclosure. As a result, the pattern of the patterned middle layer 108 ais transferred to the bottom layer 106.

Afterwards, as shown in FIG. 5F, a portion of the material layer 104 isdoped by performing an ion implantation process 174 and using thepatterned middle layer 108 a and the patterned bottom layer 106 a as amask, in accordance with some embodiments of the disclosure. As aresult, a doped region 105 is formed in the material layer 104. Thedoped region 105 may be doped with p-type dopants, such as boron or BF₂,and/or n-type dopants, such as phosphorus (P) or arsenic (As). Next, thepatterned middle layer 108 a and the patterned bottom layer 106 a areremoved.

FIGS. 6A-6H show cross-sectional representations of various stages offorming a semiconductor structure, in accordance with some embodimentsof the disclosure. The method can be used in many applications, such asfin-type field effect transistor (FinFET) device structure. Someprocesses and materials used to form the semiconductor device structurein FIGS. 6A-6H are similar to, or the same as, those used to form thesemiconductor device structure FIGS. 5A-5G and are not repeated herein.

As shown in FIG. 6A, the tri-layer photoresist layer 120 is formed overthe material layer 104. The middle layer 108 includes an auxiliary 14distributed in the solvent of the middle layer 108. The auxiliary 14 mayinclude the photoacid generator (PAG), the quencher (Q), thecross-linker or the photo base generator (PBG). The resist layer 110includes an inorganic material 12 and a solvent. The inorganic material12 are distributed in the solvent. The inorganic material 12 includesthe first linker L₁ 124 bonded to the metallic cores 122.

Next, as shown in FIG. 6B, the mask 10 is formed over the resist layer110, and the exposure process 172 is performed on the middle layer 108and the resist layer 110, in accordance with some embodiments of thedisclosure.

After the exposure process 172, the second linkers L₂ and the thirdlinkers L₃ of the auxiliary 14 in the middle layer 108 react with thefirst linkers 124 on the metallic cores 122 in the resist layer 110 toform the chemical bonds between the inorganic material 12 and theauxiliary 14. With the help of the auxiliary 14, the reaction rate ofthe chemical reaction between adjacent metallic cores 122 is increased.

Afterwards, as shown in FIG. 6C, the resist layer 110 is developed byperforming a develop process to form the patterned resist layer 110 a,in accordance with some embodiments of the disclosure. The compound 16is formed in the resist layer 110. The compound 16 is formed by reactingthe inorganic material 12 and the auxiliary 14.

Afterwards, as shown in FIG. 6D, a portion of the middle layer 108 isremoved by using the patterned resist layer 110 a as a mask to form apatterned middle layer 108 a, in accordance with some embodiments of thedisclosure. As a result, the pattern of the patterned resist layer 110 ais transferred to the middle layer 108.

Afterwards, as shown in FIG. 6E-6H, the substrate 102 continues toperform the fabricating processes similar to the fabricating processesas shown in FIGS. 5D-5G.

FIGS. 7A-7G show cross-sectional representations of various stages offorming a semiconductor structure, in accordance with some embodimentsof the disclosure. The method can be used in many applications, such asfin-type field effect transistor (FinFET) device structure. Someprocesses and materials used to form the semiconductor device structurein FIGS. 7A-7G are similar to, or the same as, those used to form thesemiconductor device structure FIGS. 5A-5G and are not repeated herein.

As shown in FIG. 7A, the modified layer 109 is formed over the tri-layerphotoresist layer 120, in accordance with some embodiments of thedisclosure.

Next, as shown in FIG. 7B, an exposure process (not shown) is performedon the modified layer 109 and the resist layer 110, in accordance withsome embodiments of the disclosure. Afterwards, the modified layer 109and the resist layer 110 are sequentially developed by two developers toform the patterned modified layer 109 a and the patterned resist layer110 a.

Afterwards, as shown in FIG. 7C, a portion of the middle layer 108 isremoved by using the patterned resist layer 110 a and the patternedmodified layer 109 a as a mask to form a patterned middle layer 108 a,in accordance with some embodiments of the disclosure. As a result, thepattern of the patterned resist layer 110 a is transferred to the middlelayer 108.

Afterwards, as shown in FIG. 7D-7G, the substrate 102 continues toperform the fabricating processes similar to the fabricating processesas shown in FIGS. 5D-5G.

Embodiments for forming a semiconductor device structure are provided. Amaterial layer is formed over a substrate, and a resist layer is formedover the material layer. The resist layer includes an inorganic materialand an auxiliary, the inorganic material includes a number of metalliccores and a number of first linkers bonded to the metallic cores. Theauxiliary includes the second linkers L₂ and the third linkers L₃. Afterperforming the exposure process on the resist layer, the second linkersL₂ and the third linkers L₃ of the auxiliary react with the firstlinkers L₁ of the inorganic materials to form a compound which has asize greater than the size of each of the metallic core. The auxiliarycan accelerate the cross-linking reactions between the first linkers L₁,the second linkers L₂ and the third linkers L₃. The radiation energy ofthe exposure process is reduced due to the addition of the auxiliary inthe resist layer. Furthermore, the line width roughness (LWR) of theresist layer is improved. Therefore, the line critical dimensionuniformity (LCDU) of the semiconductor structure is improved.

In some embodiments, a method for forming a semiconductor structure isprovided. The method includes forming a material layer over a substrateand forming a resist layer over the material layer. The resist layerincludes an inorganic material and an auxiliary, and the inorganicmaterial includes a plurality of metallic cores, and a plurality offirst linkers bonded to the metallic cores. The method also includesexposing a portion of the resist layer by performing an exposureprocess, and the auxiliary reacts with the first linkers during theexposure process. The method further includes etching a portion of theresist layer to form a patterned resist layer and patterning thematerial layer by using the patterned resist layer as a mask. The methodalso includes removing the patterned resist layer.

In some embodiments, a method for forming a semiconductor structure isprovided. The method includes forming a material layer over a substrateand forming a bottom layer over the material layer. The method alsoincludes forming a middle layer over the bottom layer and forming aresist layer over the middle layer. The resist layer includes aninorganic material having a plurality of metallic cores and a pluralityof first linkers bonded to the metallic cores. The method furtherincludes forming a modified layer below or above the resist layer, andthe modified layer includes an auxiliary. The method also includesexposing a portion of the resist layer to by performing an exposureprocess, and the auxiliary reacts with the first linkers during theexposure process. The method includes developing the resist layer toform a patterned resist layer and developing the modified layer to forma patterned modified layer. The method also includes patterning themiddle layer by using the patterned resist layer as a mask to form apatterned middle layer and removing the patterned resist layer and thepatterned modified layer. The method further includes patterning thebottom layer by using the patterned middle layer as a mask to form apatterned bottom layer.

In some embodiments, a method for forming a semiconductor structure isprovided. The method includes forming a material layer over a substrateand forming a bottom layer over the material layer. The method alsoincludes forming a middle layer over the bottom layer and forming aresist layer over the middle layer. The resist layer includes aninorganic material and an auxiliary, the inorganic material includes aplurality of first linkers bonded to a plurality of metallic cores, andthe auxiliary includes a plurality of second linkers. The methodincludes exposing a portion of the resist layer by performing anexposure process, and the second linkers react with the first linkersduring the exposure process. The method also includes etching a portionof the resist layer to form a patterned resist layer and removing aportion of the middle layer by using the patterned resist layer as amask to form a patterned middle layer. The method also includes removinga portion of the bottom layer by using the patterned middle layer as amask to form a patterned bottom layer.

In some embodiments, a method for forming a semiconductor structure isprovided. The method includes forming a material layer over a substrate,and forming a first layer over the material layer. The method alsoincludes forming a second layer over the first layer, and the secondlayer comprises an auxiliary. The method further includes forming athird layer over the second layer, and the third layer comprises aninorganic material, the inorganic material comprises a plurality ofmetallic cores, and a plurality of first linkers bonded to the metalliccores. A topmost surface of the second layer is in direct contact with abottommost surface of the third layer. The method includes exposing aportion of the second layer by performing an exposure process, and theauxiliary reacts with the first linkers during the exposure process. Themethod includes etching a portion of the third layer to form a patternedthird layer.

In some embodiments, a method for forming a semiconductor structure isprovided. The method includes forming a material layer over a substrate,and forming a bottom layer over the material layer. The method alsoincludes forming a middle layer over the bottom layer, and the middlelayer comprises an auxiliary. The method also includes forming a resistlayer over the middle layer, and the resist layer includes an inorganicmaterial having a plurality of metallic cores and a plurality of firstlinkers bonded to the metallic cores. The method includes exposing aportion of the resist layer to by performing an exposure process, andthe auxiliary reacts with the first linkers during the exposure processto form a compound in the resist layer.

In some embodiments, a method for forming a semiconductor structure isprovided. The method includes forming a bottom layer over a substrate,and forming a middle layer over the bottom layer. The middle layercomprises an auxiliary. The method includes forming a top layer over themiddle layer, and the top layer includes an inorganic material, theinorganic material includes a plurality of first linkers bonded to aplurality of metallic cores. An entirety of the top layer is higher thana top surface of the middle layer. The method includes exposing aportion of the top layer by performing an exposure process, and etchinga portion of the top layer to form a patterned top layer.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method for forming a semiconductor structure,comprising: forming a material layer over a substrate; forming a firstlayer over the material layer; forming a second layer forming a thirdlayer over the second layer, wherein the third layer comprises aninorganic material, the inorganic material comprises a plurality ofmetallic cores, and a plurality of first linkers bonded to the metalliccores, and wherein a topmost surface of the second layer is in directcontact with a bottommost surface of the third layer; exposing a portionof the second layer by performing an exposure process, wherein theauxiliary reacts with the first linkers during the exposure process; andetching a portion of the third layer to form a patterned third layer. 2.The method for forming the semiconductor structure as claimed in claim1, further comprising: performing a post-exposure baking (PEB) processon the patterned resist layer.
 3. The method for forming thesemiconductor structure as claimed in claim 1, wherein the auxiliarycomprises a photo acid generator (PAG), a quencher (Q), a photo basegenerator (PBG) or a cross-linker.
 4. The method for forming thesemiconductor structure as claimed in claim 1, wherein performing theexposure process comprises: irradiating the third layer by KryptonFluoride (KrF) excimer laser, Argon Fluoride (ArF) excimer laser,Fluoride (F₂) Excimer Laser, or Extreme ultra-violet (EUV) light.
 5. Themethod for forming the semiconductor structure as claimed in claim 1,further comprising: forming a compound in the third layer after exposingthe portion of the third layer, wherein the compound has an averagemolecular weight that is greater than that of the metallic core with thefirst linkers.
 6. The method for forming the semiconductor structure asclaimed in claim 1, wherein the third layer further comprises a solvent,and the solvent comprises propylene glycol methyl ether acetate (PGMEA),propylene glycol monomethyl ether (PGME), 1-ethoxy-2-propanol (PGEE),gamma-butyrolactone (GBL), cyclohexanone (CHN), ethyl lactate (EL),methanol, ethanol, propanol, n-butanol, acetone, dimethylformamide(DMF), isopropyl alcohol (IPA), tetrahydrofuran (THF), methyl isobutylcarbinol (MIBC), n-butyl acetate (nBA), 2-heptanone (MAK), or acombination thereof.
 7. The method for forming the semiconductorstructure as claimed in claim 1, wherein the metallic cores comprise tin(Sn), indium (In), antimony (Sb) or a combination thereof.
 8. The methodfor forming the semiconductor structure as claimed in claim 1, furthercomprising: patterning the second layer by using the patterned thirdlayer as a mask to form a patterned second layer, wherein a sidewallsurface of the patterned third layer is aligned with a sidewall surfaceof the patterned second layer.
 9. A method for forming a semiconductorstructure, comprising: forming a material layer over a substrate;forming a bottom layer over the material layer; forming a middle layerover the bottom layer, wherein the middle layer comprises an auxiliary;forming a resist layer over the middle layer, wherein the resist layercomprises an inorganic material having a plurality of metallic cores anda plurality of first linkers bonded to the metallic cores; and exposinga portion of the resist layer to by performing an exposure process,wherein the auxiliary reacts with the first linkers during the exposureprocess to form a compound in the resist layer.
 10. The method forforming the semiconductor structure as claimed in claim 9, furthercomprising: developing the resist layer to form a patterned resistlayer; and patterning the middle layer by using the patterned resistlayer as a mask to form a patterned middle layer, wherein a sidewallsurface of the patterned resist layer is aligned with a sidewall surfaceof the patterned middle layer.
 11. The method for forming thesemiconductor structure as claimed in claim 10, wherein a top surface ofthe patterned middle layer is covered by a bottom surface of thepatterned resist layer after patterning the middle layer.
 12. The methodfor forming the semiconductor structure as claimed in claim 9, whereinthe auxiliary comprises a photo acid generator (PAG), a quencher (Q), aphoto base generator (PBG) or a cross-linker.
 13. The method for formingthe semiconductor structure as claimed in claim 9, wherein a topmostsurface of the middle layer is in direct contact with a bottommostsurface of the resist layer.
 14. The method for forming thesemiconductor structure as claimed in claim 9, wherein the metalliccores comprise tin (Sn), indium (In), antimony (Sb) or a combinationthereof.
 15. The method for forming the semiconductor structure asclaimed in claim 9, wherein performing the exposure process comprises:irradiating the resist layer by Krypton Fluoride (KrF) excimer laser,Argon Fluoride (ArF) excimer laser, Fluoride (F₂) Excimer Laser, orExtreme ultra-violet (EUV) light.
 16. A method for forming asemiconductor structure, comprising: forming a bottom layer over asubstrate; forming a middle layer over the bottom layer, wherein themiddle layer comprises an auxiliary; forming a top layer over the middlelayer, wherein the top layer comprises an inorganic material, theinorganic material comprises a plurality of first linkers bonded to aplurality of metallic cores, wherein an entirety of the top layer ishigher than a top surface of the middle layer; exposing a portion of thetop layer by performing an exposure process, and etching a portion ofthe top layer to form a patterned top layer.
 17. The method for formingthe semiconductor structure as claimed in claim 16, wherein theauxiliary comprises a plurality of second linkers, and the secondlinkers react with the first linkers during the exposure process. 18.The method for forming the semiconductor structure as claimed in claim16, further comprising: removing a portion of the middle layer by usingthe patterned top layer as a mask to form a patterned middle layer,wherein a sidewall surface of the patterned top layer is aligned with asidewall surface of the patterned middle layer.
 19. The method forforming the semiconductor structure as claimed in claim 18, wherein atop surface of the patterned middle layer is covered by a bottom surfaceof the patterned top layer after forming the patterned middle layer. 20.The method for forming the semiconductor structure as claimed in claim16, wherein the metallic cores comprise tin (Sn), indium (In), antimony(Sb) or a combination thereof.